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    • 专利摘要:
    The invention relates to a material comprising a transparent substrate coated with a stack of thin layers comprising at least one functional metallic layer based on silver and at least one metallic layer based on zinc. The zinc-based metal layer is located above or below a silver-based functional metal layer and separated from this silver-based functional metal layer by at least one intermediate oxide-based layer. one or more elements chosen from zinc, titanium, zirconium, tin, niobium, magnesium, hafnium and nickel.
    公开号:FR3088633A1
    申请号:FR1860587
    申请日:2018-11-16
    公开日:2020-05-22
    发明作者:Denis Guimard；Johann SKOLSKI；Joel Bellemin
    申请人:Saint Gobain Glass France SAS；Compagnie de Saint Gobain SA；
    IPC主号:
    专利说明:

    THERMALLY TREATED MATERIAL WITH IMPROVED MECHANICAL PROPERTIES
    The invention relates to a material comprising a transparent substrate coated with a stack of thin layers comprising at least one functional metallic layer based on silver. The invention also relates to glazing comprising these materials as well as the use of such materials for manufacturing glazing for thermal insulation and / or sun protection.
    Functional silver-based metallic layers (or silver layers) have advantageous electrical conduction and infrared (IR) reflection properties, hence their use in so-called "solar control" glazing intended to reduce the amount of incoming solar energy and / or in so-called "low-emissivity" glazing aimed at reducing the amount of energy dissipated outside a building or vehicle.
    These silver layers are deposited between coatings based on dielectric materials generally comprising several dielectric layers (hereinafter "dielectric coatings") making it possible to adjust the optical properties of the stack. These dielectric layers also make it possible to protect the silver layer from chemical or mechanical attack.
    The optical and electrical properties of materials depend directly on the quality of the silver layers such as their crystalline state, their homogeneity and their environment. The term “environment” is understood to mean the nature of the layers near the silver layer and the surface roughness of the interfaces with these layers.
    To improve the quality of the functional metallic layers based on silver, it is known to use dielectric coatings comprising dielectric layers with stabilizing function intended to promote the wetting and nucleation of the silver layer. In particular, dielectric layers based on crystallized zinc oxide are used for this purpose. In fact, the zinc oxide deposited by the sputtering process crystallizes without requiring additional heat treatment. The zinc oxide layer can therefore serve as an epitaxial growth layer for the silver layer.
    For the same purpose, it is also known to use blocking layers located between a functional layer and a dielectric coating, the function of which is to protect these functional layers from possible degradation during deposition of the upper dielectric coating and / or during heat treatment. Many possibilities varying in particular by the nature, the number and the position of said blocking layers have been proposed.
    - 2 The invention relates more particularly to stacks which have to undergo a heat treatment at high temperature such as annealing, bending and / or quenching.
    Generally speaking, heat treatments at high temperatures can make stacks more susceptible to scratches. On the other hand, when scratches are created on a material before heat treatment, their visibility increases considerably after heat treatment.
    The applicant has observed that stacks comprising, near a silver layer, both blocking layers chosen from certain materials and / or certain thicknesses and dielectric layers comprising zinc, in particular based on oxide of zinc or based on zinc oxide and tin, exhibit, following the heat treatment, advantageously improved scratch resistance properties and disadvantageously degraded resistivity.
    These phenomena seem partly linked to modifications within the silver layer induced by the migration of species during the heat treatment. These changes affect not only the visual appearance but also the optical properties and the electrical conductivity of the stack.
    The reasons and mechanisms for migrating species are still poorly understood. Their occurrence seems to be highly dependent on the nature of the blocking layers and of the dielectric layers constituting the dielectric coatings located near the silver layer. The presence of certain dielectric materials in the stack, in particular of certain oxides, or of certain blocking layers, favors the migration of certain species, in particular the salting out of metallic zinc elements near the silver layer, via the reduction dielectric layers comprising zinc.
    The improvement in scratch resistance could be due to doping of the silver layer with zinc.
    The deterioration in resistivity could be due to the presence of metallic zinc elements or to defects linked to zinc located at the upper or lower interface of the silver layer and / or at the grain boundaries of the silver layer. .
    The presence of metallic zinc elements in the silver layer seems to improve durability at the expense of resistivity.
    On the strength of this observation, the applicant was interested in the effects of the voluntary insertion of a zinc-based metal layer in stacks that are fragile from the point of view of resistance to scratching and intended to undergo heat treatment. The objective is to obtain, by directly adding the metallic zinc elements, the positive effect on the scratch resistance. By doing so, improvement no longer depends
    -3the creation of mobile metallic zinc species by reduction of the layer comprising zinc.
    The applicant has thus discovered that, surprisingly, the presence of a zinc-based metal layer located near but separated from the silver layer by one or more intermediate oxide layers not only makes it possible to significantly improve the resistance to silver stack scratches, but also drastically reduce hot corrosion and cold corrosion in humid environments.
    The invention therefore relates to a material comprising a transparent substrate coated with a stack of thin layers comprising at least one functional metallic layer based on silver and at least two dielectric coatings, each dielectric coating comprising at least one dielectric layer, so that each functional metallic layer is placed between two dielectric coatings, characterized in that the stack comprises at least one metallic layer based on zinc situated above or below a functional metallic layer based on silver and separated from this functional silver-based metallic layer by at least one intermediate oxide layer based on one or more elements chosen from zinc, titanium, zirconium, tin, niobium, magnesium, l hafnium and nickel.
    The presence of a layer of metallic zinc near the silver layer causes during the heat treatment the migration of metallic zinc elements in the silver layer following the heat treatment.
    The presence of one or more intermediate oxide layers according to the invention separating the silver-based layer from the metallic zinc layer seems to make it possible to slow the diffusion of metallic zinc through the silver layer and therefore to maintain longer the metallic zinc elements in contact with the silver layer, ie at the grain boundaries or at the interfaces.
    The controlled migration of metallic zinc elements into the silver layer following the heat treatment improves the scratch resistance after heat treatment regardless of the structure of the stack. The zinc-based metal layer therefore improves mechanical resistance.
    The following is an explanation of the beneficial effect of having an intermediate oxide layer near the silver layer.
    The silver layers are polycrystalline layers, that is to say composed of a plurality of monocrystalline grains of silver. During the heat treatment, a rearrangement takes place leading to a decrease in the number of grains and an increase in the size of the grains.
    It is possible that the metallic zinc species diffuse very efficiently in the stack, that is to say at temperatures below the temperatures at which this rearrangement occurs.
    Take the case where the zinc-based metal layer is located directly above the silver layer. If the metallic zinc elements diffuse at these lower temperatures, in the absence of an intermediate oxide layer, they could easily pass through the silver layer without being sufficiently retained. In this case, the effect on the modification of the mechanics and the resistivity would be less.
    On the other hand, when an oxide intermediate layer is inserted between the silver and zinc layers, the oxide intermediate layer could act as a barrier and slow down the diffusion of metallic zinc elements. This would keep metallic zinc elements in the silver layer when the higher silver layer rearrangement temperatures are reached. The metallic zinc elements would then be retained near the silver layer.
    The intermediate oxide layer can be in direct contact with the functional silver-based metallic layer.
    According to advantageous embodiments, the stack can comprise at least one blocking layer, in particular an overlay and / or a blocking sublayer situated immediately in contact with the functional metallic layer based on silver, chosen from the metallic layers. based on a metal or a metal alloy, the layers of metallic nitride, the layers of metallic oxide and the layers of metallic oxynitride of one or more elements chosen from titanium, nickel, chromium, tantalum and niobium.
    A blocking layer above a functional silver-based metallic layer is called a blocking overlay. A blocking layer below a functional silver-based metallic layer is called a blocking layer.
    The presence of a blocking layer in contact with the silver layer also seems to make it possible to slow the diffusion of the metallic zinc through the silver layer and therefore to keep the metallic zinc elements longer in contact with the silver layer. silver.
    The intermediate oxide layer can be separated from the functional silver-based metallic layer by at least one blocking layer. The zinc-based metal layer can therefore be separated from the silver-based functional metal layer by at least one blocking layer.
    The invention therefore allows the development of a material comprising a substrate coated with a stack comprising at least one functional layer based
    -5 silver presenting, following a bending type heat treatment, quenching or annealing:
    - a lower ability to be scratched and
    - significantly improved resistance to hot and cold corrosion.
    These improvements to stacks, without further optimization, are however accompanied by a deterioration in resistivity and absorption.
    The present invention is therefore more particularly suitable for applications where:
    - obtaining a low emissivity is not critical and / or
    - an increase in absorption is also not critical or can be compensated by other means such as a reduction in the thickness of the blocking layers or a reduction in the absorption induced by "more" layers absorbent pads located at any position in the stack.
    The solution of the invention is particularly suitable in the case of stacks with several functional layers based on silver, in particular stacks with two or three functional layers which are particularly fragile from the point of view of scratches.
    The present invention is also particularly suitable in the case of stacks with a single functional layer based on silver intended for applications where the stacks are highly prone to cold corrosion in a humid environment. This is particularly the case of single glazing comprising stacks with a single layer of silver used as glazing for a refrigerator door.
    The invention also relates to:
    - glazing comprising a material according to the invention,
    - glazing comprising a material according to the invention mounted on a vehicle or on a building, and
    - the process for preparing a material or a glazing according to the invention,
    - the use of glazing according to the invention as solar control glazing and / or low emissivity for the building or vehicles,
    - a building, a vehicle or a device comprising glazing according to the invention.
    Throughout the description, the substrate according to the invention is considered to be laid horizontally. The stack of thin layers is deposited on top of the substrate. The meaning of the expressions "above" and "below" and "lower" and "higher" should be considered in relation to this orientation. In the absence of a specific stipulation, the expressions "above" and "below" do not necessarily mean that two layers and / or coatings are arranged in contact with each other. When it is specified that a layer is deposited "in contact" with another
    -6 layer or coating, this means that there cannot be one (or more) layer (s) interposed (s) between these two layers (or layer and coating).
    All the luminous characteristics described are obtained according to the principles and methods of the European standard EN 410 relating to the determination of the luminous and solar characteristics of the glazing used in glass for construction.
    Glazing for the building generally delimits two spaces, a space qualified as "exterior" and a space qualified as "interior". The sunlight entering a building is considered to go from the outside to the inside.
    According to the invention, the light characteristics are measured according to the illuminant D65 at 2 ° perpendicular to the material mounted in a double glazing:
    - TL corresponds to the light transmission in the visible in%,
    - Rext corresponds to the external light reflection in the visible in%, observer on the outside space side,
    - Rint corresponds to the interior light reflection in the visible in%, observer on the interior space side,
    - a * T and b * T correspond to the colors in transmission a * and b * in the L * a * b * system,
    - a * Rext and b * Rext correspond to the colors in reflection a * and b * in the L * a * b * system, observer on the outside space side,
    - a * Rint and b * Rint correspond to the colors in reflection a * and b * in the L * a * b * system, observer on the interior space side.
    The preferred characteristics which appear in the following description are applicable both to the material according to the invention and, where appropriate, to the glazing or to the process according to the invention.
    The stack is deposited by sputtering assisted by a magnetic field (magnetron process). According to this advantageous embodiment, all the layers of the stack are deposited by sputtering assisted by a magnetic field.
    Unless otherwise stated, the thicknesses mentioned in this document are physical thicknesses and the layers are thin layers. The term “thin layer” is intended to mean a layer having a thickness of between 0.1 nm and 100 micrometers.
    In the following paragraphs, the zinc-based metal layers are defined as they are obtained during deposition, that is to say before heat treatment. Since the heat treatment induces the migration of metallic zinc elements in the stack, it is not possible to determine with certainty,
    -7depending on the thicknesses deposited, how is this layer of metallic zinc modified following the heat treatment.
    The term "metallic layer" means a layer comprising not more than 30%, 20% or 10% of oxygen and / or nitrogen in atomic percentage in the layer.
    The layers are deposited in metallic form. Following deposition and before heat treatment, they should not contain more than 10% oxygen and / or nitrogen. However, depending on the nature of the layer deposited directly above, these zinc-based metal layers are liable to undergo partial oxidation which can lead to higher proportions of oxygen or nitrogen. These proportions are however less than 30 or 20%. In any event, at least part of the thickness of these zinc-based metal layers is not oxidized or nitrided.
    Zinc-based metal layers (before heat treatment) include at least 20%, at least 30%, at least 40%, at least 50%, at least 60%, at least 70%, at least 80% , at least 90%, at least 95%, at least 96%, at least 97%, at least 98%, at least 99% or 100% by mass of zinc relative to the mass of the metallic layer based on zinc .
    The zinc-based metal layers can be chosen from:
    - metallic zinc layers,
    - doped metallic zinc layers,
    - metallic layers based on zinc alloy.
    According to the invention, the term “metallic zinc layer” is understood to mean metallic layers of pure zinc which may still include some impurities. In this case, the total mass of zinc represents at least 99% by mass of the mass of the zinc-based metal layer.
    According to the invention, the doped zinc layers comprise at least 90.0%, at least 95%, at least 96%, at least 97% or at least 98% by mass of zinc of the mass of the metal layer based zinc.
    The doped zinc layers can be chosen from layers based on zinc and at least one element chosen from titanium, nickel, aluminum, tin, niobium, chromium, magnesium, copper, silicon, silver or gold.
    According to the invention, the zinc alloy-based layers comprise at least 20%, at least 30%, at least 40%, at least 50%, at least 60%, at least 70%, at least 80% or at least 90% by mass of zinc of the mass of the metallic layer based on zinc.
    The layers based on zinc alloy can be chosen from the layers based on zinc and at least one element chosen from titanium, nickel, chromium,
    -8tin. By way of example, there may be mentioned binary zinc and titanium alloys such as Zn 2 Ti or ternary alloys based on zinc, nickel and chromium such as ZnNiCr.
    The thickness of the zinc-based metal layer is from 0.2 to 10 nm.
    The thickness of the zinc-based metal layer can be:
    - greater than or equal to 0.2 nm, greater than or equal to 0.5 nm, greater than or equal to 1.0 nm, greater than or equal to 1.2 nm or greater than or equal to 1.5 nm, and / or
    - less than or equal to 10 nm, less than or equal to 8 nm, less than or equal to 7 nm, less than or equal to 6 nm, less than or equal to 5 nm or less than or equal to nm.
    According to the invention, the metallic layer based on zinc is separated from the functional metallic layer based on silver by at least one intermediate oxide layer based on one or more elements chosen from zinc, titanium, zirconium, tin, niobium, magnesium, hafnium and nickel, preferably from titanium, zinc and tin.
    According to the invention, an intermediate oxide layer “based on one or more elements” means that the layer comprises at least 50%, at least 60%, at least 70%, at least 80% by mass of said one or several elements relative to the total mass of all the elements constituting the oxide-based layer, excluding oxygen and nitrogen.
    Preferably, the intermediate oxide layer is chosen from layers based on zinc oxide, based on titanium oxide, based on tin oxide or based on nickel oxide.
    According to the invention, an oxide-based layer of an element means that the layer comprises at least 50%, at least 60%, at least 70%, at least 80% by mass of said element relative to the mass total of all the elements constituting the oxide-based layer excluding oxygen and nitrogen.
    The thickness of an oxide-based intermediate layer as defined above can for example be:
    - greater than or equal to 0.5 nm, greater than or equal to 1 nm, greater than or equal to 2 nm, greater than or equal to 3 nm, greater than or equal to 4 nm, greater than or equal to nm, greater than or equal to 6 nm , greater than or equal to 7 nm, greater than or equal to 8 nm or greater than or equal to 9 nm, and / or
    - less than or equal to 25 nm, less than or equal to 20 nm, less than or equal to 15 nm, less than or equal to 13 nm, less than or equal to 12 nm, less than or equal to 11 nm, less than or equal to 10 nm, less than or equal to 9 nm, less than or equal to 8 nm.
    -9The thickness of the single or all layers separating the intermediate oxide layer and the functional metallic layer based on silver is between 0 and 15.0 nm.
    The thickness of all the layers separating the functional metallic layer based on silver from the metallic layer based on zinc can be:
    - greater than or equal to 0.5 nm, greater than or equal to 1 nm, greater than or equal to 2 nm, greater than or equal to 3 nm, greater than or equal to 4 nm, greater than or equal to 5 nm, greater than or equal to 6 nm, greater than or equal to 7 nm, greater than or equal to 8 nm or greater than or equal to 9 nm and / or
    - less than or equal to 25 nm, less than or equal to 20 nm, less than or equal to 15 nm, less than or equal to 13 nm, less than or equal to 12 nm, less than or equal to 11 nm, less than or equal to 10 nm, less than or equal to 9 nm or less than or equal to 8 nm.
    The zinc-based metal layer can be directly in contact with the intermediate oxide layer.
    According to an advantageous embodiment, the intermediate oxide layer is a crystallized layer such as a zinc oxide layer. Indeed, it seems that the crystallized layers allow a greater diffusion of metallic elements via their grain boundaries.
    The zinc oxide layers, also used and called the "stabilizing" or "wetting" layer, are generally crystallized dielectric layers.
    Zinc oxide layers may include at least 50%, at least 60%, at least 70%, at least 80%, at least 90%, at least 95%, at least 96%, at least 97%, at least 98%, at least 99% or 100% by mass of zinc relative to the total mass of all the elements constituting the zinc oxide-based layer excluding oxygen and l 'nitrogen.
    To be correctly crystallized by sputtering deposition, the zinc oxide-based layers advantageously comprise at least 80%, or even at least 90% by mass of zinc relative to the total mass of all the elements constituting the base layer zinc oxide excluding oxygen and nitrogen.
    The layers based on zinc oxide can comprise one or more elements chosen from aluminum, titanium, niobium, zirconium, magnesium, copper, silver, gold, silicon, molybdenum, nickel, chromium, platinum, indium, tin and hafnium, preferably aluminum.
    A priori, the zinc oxide-based layer is not nitrided, however traces may exist.
    The zinc oxide-based layer comprises, in ascending order of preference, at least 80%, at least 90%, at least 95%, at least 98%, at least 100%, by mass of oxygen relative to to the total mass of oxygen and nitrogen.
    According to another advantageous embodiment, the intermediate oxide layer is a layer based on titanium oxide.
    Titanium oxide layers include, at least 50%, at least 60%, at least 70%, at least 80%, at least 90%, at least 95%, at least 96%, at least 97 %, at least 98%, at least 99% or 100% by mass of titanium relative to the total mass of all the elements constituting the zinc oxide-based layer excluding oxygen and nitrogen.
    The titanium oxide-based layers may comprise one or more elements chosen from aluminum, zinc, niobium, zirconium, magnesium, copper, silver, gold, silicon, molybdenum, nickel, chromium, platinum, indium, tin and hafnium, preferably aluminum.
    A priori, the layer based on titanium oxide is not nitrided, however traces may exist.
    The titanium oxide-based layer comprises, in increasing order of preference, at least 80%, at least 90%, at least 95%, at least 98%, at least 100%, by mass of oxygen relative to the total mass of oxygen and nitrogen.
    The stack may comprise at least one blocking overlay, preferably located immediately in contact with the functional silver-based metallic layer.
    The stack may comprise at least one blocking under layer, preferably located immediately in contact with the functional metallic layer based on silver.
    The blocking layers are chosen from metallic layers based on a metal or a metal alloy, metallic nitride layers, metallic oxide layers and metallic oxynitride layers of one or more elements chosen from titanium, nickel, chromium, tantalum and niobium such as Ti, TiN, TiOx, Nb, NbN, Ni, NiN, Cr, CrN, NiCr, NiCrN.
    When these blocking layers are deposited in metallic, nitrided or oxynitrided form, these layers can undergo partial or total oxidation depending on their thickness and the nature of the layers which surround them, for example, at the time of the deposition of the next layer or by oxidation on contact with the underlying layer.
    The blocking layers are preferably chosen from metallic layers, in particular an alloy of nickel and chromium (NiCr) or titanium.
    Each blocking layer has a thickness of between 0.1 and 5.0 nm. The thickness of these blocking layers can be:
    - at least 0.1 nm, at least 0.2 nm, at least 0.5 nm and / or
    - not more than 5.0 nm, not more than 4.0 nm, not more than 3.0 nm, not more than 2.0 nm.
    When the intermediate oxide layer is chosen from a layer based on nickel oxide, based on titanium oxide or based on niobium oxide, this layer can also perform the function of blocking layer.
    Preferably, the zinc-based metal layer (s) are located above the silver-based functional metal layer.
    Preferably, the zinc-based metal layer or layers are located above a silver layer and above a blocking overlay. In this configuration, the zinc-based metal layer is located above the silver-based functional metal layer and is separated from this layer by at least one blocking overlay.
    However, other configurations are possible.
    The zinc-based metal layer can be located:
    - above a functional metallic layer based on silver, the metallic zinc layer is separated from the functional metallic layer based on silver by at least one intermediate oxide layer (sequence Ag H intermediate layer of oxide H Zn),
    - above a functional metallic layer based on silver, the metallic zinc layer is separated from the functional metallic layer based on silver by at least one blocking overlay and an intermediate oxide layer (Ag sequence // Blocking layer H intermediate layer of oxide H Zn),
    - below a functional metallic layer based on silver, the metallic zinc layer is separated from the functional metallic layer based on silver by at least one intermediate oxide layer (sequence Zn / intermediate layer of oxide // Ag),
    - below a functional metallic layer based on silver, the metallic zinc layer is separated from the functional metallic layer based on silver by at least one blocking overlay and an intermediate oxide layer (sequence Zn // Blocking layer // Intermediate oxide layer H Ag).
    The physical thickness of all the possible layers separating the layer based on metallic zinc and the functional layer is between 1 and 15.0 nm, or even between 2 and 15 nm, or even between 5 and 10 nm.
    All the configurations according to which the zinc-based metal layer is situated above the silver-based functional metal layer have, for an optimized thickness, a resistivity before heat treatment which is not degraded compared to a stack not comprising the zinc-based metal layer.
    - 12 According to the invention, an undegraded resistivity means a variation in resistivity due to the presence of the zinc layer not greater than 15%, preferably not greater than 10%.
    The configuration in which the zinc-based metal layer is located above and separated from the functional silver-based metal layer by a blocking overlay and by an intermediate oxide layer appears to be successful.
    It is also possible to use a blocking under layer. The use of the blocking underlay improves the mechanical resistance. A blocking sublayer situated below a silver layer and a zinc-based metallic layer situated above and separated from the silver layer by an intermediate oxide layer and optionally are combined. by a blocking overlay.
    The configurations in which the zinc-based metal layer is located below and close to the silver-based functional metal layer have a degraded resistivity before heat treatment. One possible explanation is that the zinc layer under the silver layer increases the roughness of the lower interface of the silver layer.
    According to the invention, the term "layer located near >>" means a layer located, in order of preferably increasing within 15 nm, within 10 nm, within 5 nm, within 4 nm, less than 3 nm, less than 2 nm from another layer.
    The following embodiments are particularly advantageous since they give the best results:
    - the zinc-based metal layer is separated from the silver layer by at least one blocking layer and by an intermediate oxide layer,
    - the zinc-based metal layer is located above the silver layer,
    - The stack comprises a blocking overlay located immediately in contact with the functional metallic layer based on silver.
    Zinc-based metal layers, to be effective, must allow the diffusion of metallic zinc elements towards the silver layer. It is likely that if these zinc layers are separated from the silver layer:
    - by one or more dielectric layers which are too thick, for example layers of zinc oxide and tin which are too thick and / or
    - by one or more dielectric layers with barrier function such as layers of silicon nitrides and / or aluminum and / or zirconium,
    - 13the diffusion of these metallic zinc elements will be greatly reduced or even prevented. The zinc-based metal layer then becomes ineffective from the point of view of improving mechanical properties.
    According to the invention, the stack comprises at least one functional metallic layer based on silver.
    The functional metallic layer based on silver, before or after heat treatment, comprises at least 95.0%, preferably at least 96.5% and better still at least 98.0% by mass of silver relative to the mass of the functional layer.
    Preferably, the functional metallic layer based on silver before heat treatment comprises less than 1.0% by mass of metals other than silver relative to the mass of the functional metallic layer based on silver.
    After heat treatment, the functional metallic layer based on silver is likely to include a proportion of zinc. A measurement of the zinc doping can be carried out for example by microprobe analysis of Castaing (ElectroProbe Micro Analyzer or ΕΡΜΑ in English) or by measurement by atomic tomographic probe ("Atom Probe Tomography").
    The thickness of the silver-based functional layer is from 5 to 25 nm.
    The stack of thin layers comprises at least one functional layer and at least two dielectric coatings comprising at least one dielectric layer, so that each functional layer is placed between two dielectric coatings.
    The stack of thin layers may comprise at least two metallic functional layers based on silver and at least three dielectric coatings comprising at least one dielectric layer, so that each functional layer is placed between two dielectric coatings.
    The stack of thin layers can comprise at least three functional layers and at least four dielectric coatings comprising at least one dielectric layer, so that each functional layer is placed between two dielectric coatings.
    The invention is not limited to the insertion of a single metallic layer based on zinc. It is obviously possible to have a metallic layer based on zinc near at least two functional layers based on silver, or even each functional layer based on silver.
    A stack can therefore comprise one or more metallic layers based on zinc.
    - A stack comprising at least two functional metallic layers based on silver may comprise at least two metallic layers based on zinc near at least two functional metallic layers based on silver.
    It is also possible, in multi-functional silver-based stacks, that each silver-based metallic functional layer is in proximity to a zinc-based metallic functional layer.
    The stack is located on at least one of the faces of the transparent substrate.
    By "dielectric coating" in the sense of the present invention, it should be understood that there may be a single layer or several layers of different materials inside the coating. A "dielectric coating" according to the invention mainly comprises dielectric layers. However, according to the invention, these coatings can also comprise layers of other nature, in particular absorbent layers, for example metallic.
    We consider that a "same" dielectric coating is located:
    - between the substrate and the first functional layer,
    - between each functional metallic layer based on silver,
    - above the last functional layer (furthest from the substrate).
    By "dielectric layer" in the sense of the present invention, it should be understood that from the point of view of its nature, the material is "non-metallic", that is to say is not a metal. In the context of the invention, this term designates a material having an n / k ratio over the entire wavelength range of the visible (from 380 nm to 780 nm) equal to or greater than 5. n denotes the index of actual refraction of the material at a given wavelength and k represents the imaginary part of the refractive index at a given wavelength; the n / k ratio being calculated at a given given wavelength for n and for k.
    The thickness of a dielectric coating corresponds to the sum of the thicknesses of the layers making it up.
    The dielectric coatings have a thickness greater than 15 nm, preferably between 15 and 200 nm.
    The dielectric layers of dielectric coatings have the following characteristics, alone or in combination:
    - they are deposited by sputtering assisted by magnetic field,
    - they are chosen from the oxides or nitrides of one or more elements chosen from titanium, silicon, aluminum, zirconium, tin and zinc,
    - They have a thickness greater than 2 nm, preferably between 2 and 100 nm.
    The dielectric layers can be layers qualified as crystallized layers also called stabilizing or wetting layer as defined above. These layers are generally based on zinc oxide.
    Preferably, the dielectric coating located directly below the functional metallic layer based on silver comprises at least one crystallized dielectric layer, in particular based on zinc oxide, optionally doped using at least one other element, like aluminum.
    In all stacks, the dielectric coating closest to the substrate is called the bottom coating and the dielectric coating furthest from the substrate is called the top coating. Stacks with more than one silver layer also include intermediate dielectric coatings located between the upper and lower coating.
    Preferably, the lower or intermediate coatings comprise a crystallized dielectric layer based on zinc oxide situated directly in contact with the metallic layer based on silver or separated by a blocking under layer.
    Preferably, the intermediate or upper coatings comprise a crystallized dielectric layer based on zinc oxide situated directly in contact with the metallic layer based on silver or separated by a blocking overlay.
    These zinc oxide layers have a thickness:
    - at least 1.0 nm, at least 2.0 nm, at least 3.0 nm, at least 4.0 nm, at least 5.0 nm, and / or
    - not more than 25 nm, not more than 10 nm, not more than 8.0 nm.
    The dielectric layers can have a barrier function. By dielectric layers with barrier function is meant (hereinafter barrier layer), a layer of a material capable of forming a barrier to the diffusion of oxygen and water at high temperature, originating from the ambient atmosphere or from the substrate. transparent, towards the functional layer. Such dielectric layers are chosen from the layers:
    - based on silicon and / or aluminum and / or zirconium compounds chosen from oxides such as SiO2, nitrides such as silicon nitride Si3N4 and aluminum nitrides AIN, and oxynitrides SiOxNy, optionally doped using at least one other element,
    - based on zinc oxide and tin,
    - based on titanium oxide.
    Preferably, each coating comprises at least one dielectric layer consisting of:
    - of an aluminum and / or silicon and / or zirconium nitride or oxynitride or
    - a mixed zinc and tin oxide, or
    - of a titanium oxide.
    Preferably, each dielectric coating comprises at least one dielectric layer with a barrier function based on an aluminum nitride and / or silicon and / or zirconium. Preferably, the sum of the thicknesses of all the barrier function dielectric layers based on an aluminum nitride and / or silicon and / or zirconium in each dielectric coating is greater than or equal to 15 nm, or even greater than or equal at 20 nm.
    These dielectric layers have, in increasing order of preference, a thickness:
    - less than or equal to 40 nm, less than or equal to 30 nm, less than or equal to 25 nm, and / or
    - greater than or equal to 5 nm, greater than or equal to 10 nm or greater than or equal to 15 nm.
    The stack of thin layers may optionally include a protective layer. The protective layer is preferably the last layer of the stack, that is to say the layer furthest from the substrate coated with the stack (before heat treatment). These layers generally have a thickness of between 0.5 and 10 nm, preferably 1 and 5 nm. This protective layer can be chosen from a layer of titanium, zirconium, hafnium, silicon, zinc and / or tin, this or these metals being in metallic, oxidized or nitrided form.
    According to one embodiment, the protective layer is based on zirconium oxide and / or titanium, preferably based on zirconium oxide, titanium oxide or titanium oxide and zirconium.
    The substrate coated with the stack or the stack only is intended to undergo a heat treatment. However, the present invention also relates to the coated substrate which is not heat treated.
    The stack may not have undergone a heat treatment at a temperature above 500 ° C, preferably 300 ° C.
    The stack may have been heat treated at a temperature above 300 ° C, preferably 500 ° C.
    The heat treatments are chosen from annealing, for example by rapid thermal annealing ("Rapid Thermal Process") such as laser annealing or flash lamp, quenching and / or bending. Rapid thermal annealing is for example described in application WO2008 / 096089.
    The heat treatment temperature (at the stack) is greater than 300 ° C, preferably greater than 400 ° C, and better still greater than 500 ° C.
    The substrate coated with the stack may be a curved or tempered glass.
    The transparent substrates according to the invention are preferably made of a rigid mineral material, such as glass, or organic polymers (or polymer).
    The transparent organic substrates according to the invention can also be made of polymer, rigid or flexible. Examples of polymers suitable according to the invention include, in particular:
    - polyethylene,
    - polyesters such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyethylene naphthalate (PEN);
    - polyacrylates such as polymethyl methacrylate (PMMA);
    - polycarbonates;
    - polyurethanes;
    - polyamides;
    - polyimides;
    - fluorinated polymers such as fluoroesters such as ethylene tetrafluoroethylene (ETFE), polyvinylidene fluoride (PVDF), polychlorotrifluorethylene (PCTFE), chlorotrifluorethylene ethylene (ECTFE), fluorinated ethylene-propylene copolymers (FEP);
    - photocrosslinkable and / or photopolymerizable resins, such as thiolene, polyurethane, urethane-acrylate, polyester-acrylate resins and
    - polythiourethanes.
    The substrate is preferably a sheet of glass or glass ceramic.
    The substrate is preferably transparent, colorless (it is then a clear or extra-clear glass) or colored, for example in blue, gray or bronze. The glass is preferably of the soda-lime-silica type, but it can also be made of borosilicate or alumino-borosilicate type glass.
    According to a preferred embodiment, the substrate is made of glass, in particular silico-sodium-calcium or of polymeric organic material.
    The substrate advantageously has at least one dimension greater than or equal to 1 m, even 2 m and even 3 m. The thickness of the substrate generally varies between 0.5 mm and 19 mm, preferably between 0.7 and 9 mm, in particular between 2 and 8 mm, or even between 4 and 6 mm. The substrate can be flat or curved, or even flexible.
    The invention also relates to a glazing unit comprising at least one material according to the invention. The invention relates to glazing which can be in the form of monolithic, laminated or multiple glazing, in particular double glazing or triple glazing.
    A monolithic glazing has 2 faces, the face 1 is outside the building and therefore constitutes the exterior wall of the glazing, the face 2 is inside the building and therefore constitutes the interior wall of the glazing.
    Multiple glazing comprises at least one material according to the invention and at least one additional substrate, the material and the additional substrate are separated by at
    - 18less an intermediate gas slide. The glazing creates a separation between an exterior space and an interior space.
    Double glazing has 4 sides, side 1 is outside the building and therefore constitutes the outer wall of the glazing, side 4 is inside the building and therefore constitutes the inner wall of the glazing, sides 2 and 3 being inside the double glazing.
    A laminated glazing unit comprises at least one structure of the first substrate / sheet (s) / second substrate type. The polymer sheet can in particular be based on polyvinyl butyral PVB, ethylene vinyl acetate EVA, polyethylene terephthalate PET, polyvinyl chloride PVC. The stack of thin layers is positioned on at least one of the faces of one of the substrates.
    These glazings can be mounted on a building or a vehicle.
    These glazings can be mounted on devices such as oven or refrigerator doors.
    The following examples illustrate the invention.
    Examples
    I. Preparation of substrates: Stacks, deposit conditions
    Stacks of thin layers defined below are deposited on clear soda-lime glass substrates with a thickness of 2 or 4 mm.
    In the examples of the invention:
    - the functional layers are silver layers (Ag),
    - the blocking layers are metallic layers of nickel and chromium alloy (NiCr),
    - The dielectric layers are based on silicon nitride doped with aluminum (Si 3 N 4 : Al), titanium oxide and zinc oxide (ZnO).
    The conditions for depositing the layers, which have been deposited by sputtering (so-called “cathode magnetron sputtering”), are summarized in Table 1.
    Table 1 Target used Deposition pressure Gas Ag Ag 8.10-3 mbar 100% Zn Zn 2.10-3 mbar 100% NiCr Ni: Cr at 80%: 20% by weight 2.10-3 mbar 100% Si3N4 If: 92% AI: 8% by weight 2.10-3 mbar Ar / (Ar + N2) to55% ZnO Al: ZnO (5% Al by weight) 2.10-3 mbar 100%
    - 19The tables below list the materials and physical thicknesses in nanometers (unless otherwise indicated) of each layer or coating which constitutes the stacks as a function of their positions vis-à-vis the substrate carrying the stack.
    Materials Layers Ref. 1 Ref. 2 Emp. 1 Emp.2 Dielectric coating S13N4ZnZnO 305 305 3025 3025 OB blocking layer NiCr 0 1 0 1 Functional layer Ag 10 10 10 10 UB blocking layer NiCr - - - - Dielectric coating ZnOS13N4 520 520 520 520 Substrate (mm) glass
    Materials Layers Ref. 3 Ref. 4 Emp. 3 Emp.4 Dielectric coating S13N4 30 30 30 30Zn - - 2 2TiO x 5 5 5 5 OB blocking layer NiCr 0 1 0 1 Functional layer Ag 10 10 10 10 UB blocking layer NiCr - - - - Dielectric coating ZnO 5 5 5 5S13N4 20 20 20 20 Substrate (mm) glass
    Materials Layers Ref. 5 Emp. 5 Dielectric coating S13N4 21 21Zn - 2ZnO 5 5 OB blocking layer NiCr 1 1 Functional layer Ag 18 18 UB blocking layer NiCr 1 1 Dielectric coating ZnOS13N4ZnOZn 57750 57752 OB blocking layer NiCr 1 1 Functional layer Ag 11 11 UB blocking layer NiCr 1 1 Dielectric coating ZnOS13N4 536 536 Substrate (mm) glass
    II. Mechanical properties
    Erichsen tests at Pointe (EST) under the following conditions were carried out:
    - EST: This test consists in applying a point (Van Laar point, steel ball) to a given force (in Newton) to make a scratch in the stack and
    -20 possibly to postpone the width of the stripes. The EST test (without any other qualifier) is carried out without heat treatment.
    - EST-TT: This test consists in carrying out an EST test followed by a heat treatment under the following conditions: Applied force: 0.3 N, 0.5 N, 0.8 N, 1 N, 3 N or 5 N ; Heat treatment, 10 minutes at a temperature of 650 ° C,
    - TT-EST: This test consists of carrying out a heat treatment followed by an EST test under the following conditions: Heat treatment, 10 minutes at a temperature of 650 ° C; Applied force: 0.3 N, 0.5 N, 0.8 N, 1 N, 3 N or 5 N.
    1. Mechanical resistance
    The TT-EST and EST-TT tests are carried out. The width of the stripes obtained is measured. There is a decrease in the width of the scratches and the visibility of the scratches for the materials according to the invention (Emp. 1, Emp. 2, Emp. 3, Emp. 4 and Emp 5) compared to the reference materials (Ref 1, Ref 2, Ref 3 Ref 4 and Ref 5).
    The improvement provided by the zinc-based metal layer on the reduction in the width of the scratches is significant in the light of the examples.
    In alternative embodiments, an improvement could be observed for smaller ranges of metallic zinc thickness.
    2. Microscopic observations: Hot corrosion
    The morphology of the layers is analyzed by light microscopy. Scratch images after EST-TT test were taken.
    The scratches, when present, are much finer for the materials according to the invention (Emp. 1, Emp. 2, Emp. 3, Emp. 4 and Emp. 5) than for the reference materials (Ref. 1, Ref 2, Ref 3 Ref 4 and Ref 5). But above all, the scratches of the materials according to the invention comprising a metallic layer based on zinc are not corroded. This result is observed for stacks with a functional layer or with several functional layers.
    These observations clearly show that the incorporation of metallic zinc performs two functions. This improves resistance to scratch resistance but also drastically resistance to hot corrosion.
    3. Microscopic observation: Cold corrosion
    High humidity tests (HH test) were carried out. These tests consist in placing the materials for 5 and 20 days at 90% humidity and 50 ° C.
    - 21 The tests were carried out on non-heat treated materials (LV) and on heat treated materials (AT). The following assessments are given:
    - "0 >>: no corrosion points,
    - "+ >>: some points of corrosion,
    - "++": visible corrosion points,
    - "+++": Lots of corrosion points.
    The reference stacks without heat treatment have corrosion defects visible to the eye after 5 days of HH test (++). The density of the corrosion points increases after 20 days of HH test (+++; Ref. 1, Ref. 2, Ref. 3 Ref. 4 and Ref. 5).
    For materials according to the invention without heat treatment, the presence of a zinc-based metal layer prevents the formation of corrosion points. No corrosion points are observed after 5 days and only a few points after 20 days (+; Emp. 1, Emp. 2, Emp. 3, Emp. 4 and Emp. 5).
    The incorporation of a zinc-based metal layer significantly increases the resistance to cold corrosion.
    The heat treated reference stacks become completely hazy after 20 days. Characterization under an optical microscope after 5 days shows a very high density of micrometric defects in addition to the large corrosion defects already observed for the non-heat treated material.
    For the heat treated materials according to the invention, the presence of a zinc-based metal layer prevents the formation of haze linked to cold corrosion.
    According to the invention, thanks to the incorporation of a zinc-based metal layer, a significant improvement in the resistance to cold corrosion is observed both on heat-treated and non-heat-treated materials.
    III. Assessment of degradation of resistivity and absorption
    The square resistance Rsq, corresponding to the resistance reported on the surface, is measured by induction with a Nagy SMR-12. The square resistance was measured before heat treatment (BT) and after heat treatments (AT).
    The reference stacks (without layer of metallic zinc) show a reduction in resistivity following the heat treatment. This gain in resistivity is equal to approximately 30% at 650 ° C.
    When a zinc-based metal layer is added, the resistivity is degraded.
    The absorption increases following the addition of a zinc-based metal layer.
    IV. Conclusion
    The examples according to the present invention show that the insertion of a metallic layer based on zinc drastically improves the mechanical properties with in particular a reduction in the visibility of scratches before and after heat treatment (test results EST, EST-TT and TT- EAST). The incorporation of the zinc-based metal layer also leads to a strong reduction in hot corrosion, see to its removal as the results in the EST-TT test prove.
    The solution of the invention therefore allows:
    - to obtain excellent scratch resistance,
    - significantly improve resistance to hot corrosion,
    - significantly improve resistance to cold corrosion.
    On the other hand, the use of such a layer affects the resistivity and the absorption.
    权利要求:
    Claims (15)
    [1" id="c-fr-0001]
    1. Material comprising a transparent substrate coated with a stack of thin layers comprising at least one functional metallic layer based on silver and at least two dielectric coatings, each dielectric coating comprising at least one dielectric layer, so that each functional metal layer is disposed between two dielectric coatings, characterized in that the stack comprises at least one metallic layer based on zinc situated above or below a functional metallic layer based on silver and separated from this layer metallic metal based on silver by at least one intermediate layer of oxide based on one or more elements chosen from zinc, titanium, zirconium, tin, niobium, magnesium, hafnium and nickel.
    [2" id="c-fr-0002]
    2. Material according to claim 1, characterized in that the intermediate oxide layer is chosen from layers based on zinc oxide, based on titanium oxide, based on tin oxide or nickel oxide base.
    [3" id="c-fr-0003]
    3. Material according to any one of the preceding claims, characterized in that the thickness of all the layers separating the functional metallic layer based on silver from the metallic layer based on zinc is greater than or equal to 0.5 nm .
    [4" id="c-fr-0004]
    4. Material according to any one of the preceding claims, characterized in that the thickness of all the layers separating the functional metallic layer based on silver from the metallic layer based on zinc is less than or equal to 25 nm.
    [5" id="c-fr-0005]
    5. Material according to any one of the preceding claims, characterized in that the stack comprises at least one blocking layer, in particular an overlay and / or a blocking sublayer situated immediately in contact with the functional metallic layer based on silver, chosen from metallic layers based on a metal or a metallic alloy, metallic nitride layers, metallic oxide layers and metallic oxynitride layers of one or more elements chosen from titanium , nickel, chromium, tantalum and niobium.
    [6" id="c-fr-0006]
    6. Material according to any one of the preceding claims, characterized in that the zinc-based metal layer is separated from the silver-based functional metal layer by at least one blocking layer.
    [7" id="c-fr-0007]
    7. Material according to any one of the preceding claims, characterized in that the zinc-based metal layer is located above the silver-based functional metal layer.
    [8" id="c-fr-0008]
    8. Material according to any one of the preceding claims, characterized in that the stack comprises a blocking overlay situated immediately in contact with the functional metallic layer based on silver.
    [9" id="c-fr-0009]
    9. Material according to any one of the preceding claims, characterized in that the thickness of the zinc-based metal layer is between 0.2 and 10 nm.
    [10" id="c-fr-0010]
    10. Material according to any one of the preceding claims, characterized in that the zinc-based metal layers comprise at least 20% by mass of zinc relative to the mass of the zinc-based metal layer.
    [11" id="c-fr-0011]
    11. Material according to any one of the preceding claims, characterized in that each dielectric coating comprises at least one dielectric layer with barrier function based on an aluminum nitride and / or silicon and / or zirconium.
    [12" id="c-fr-0012]
    12. Material according to any one of the preceding claims, characterized in that the stack has not undergone a heat treatment at a temperature above 500 ° C, preferably 300 ° C.
    [13" id="c-fr-0013]
    13. Material according to any one of claims 1 to 11 characterized in that the stack has undergone a heat treatment at a temperature above 300 ° C, preferably 500 ° C.
    [14" id="c-fr-0014]
    14. Material according to any one of the preceding claims, characterized in that the substrate is made of glass, in particular silica-soda-lime or of polymeric organic material.
    [15" id="c-fr-0015]
    15. Glazing comprising a material according to any one of claims 1 to 14 characterized in that it is in the form of monolithic, laminated or multiple glazing, in particular double glazing or triple glazing.
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    同族专利:
    公开号 | 公开日
    US20220009826A1|2022-01-13|
    WO2020099801A1|2020-05-22|
    CO2021006351A2|2021-06-21|
    EP3880623A1|2021-09-22|
    FR3088633B1|2021-04-30|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US20020034641A1|1998-12-18|2002-03-21|Asahi Glass Company, Ltd.|Glazing panel|
    EP1077203A1|1999-08-16|2001-02-21|H.R. Glass Coatings B.V.|Coated substrate and method for coating a substrate|
    DE102005038139A1|2005-08-12|2007-02-15|Saint-Gobain Glass Deutschland Gmbh|Thermal stress resistant, low emission, multilayer laminate for coating transparent substrate, e.g. pane of glass, includes metallic or weakly nitrided titanium layer blocking layer to improve optical properties|
    WO2008096089A2|2007-01-05|2008-08-14|Saint-Gobain Glass France|Method for depositing a thin layer and product thus obtained|
    FR3036701A1|2015-05-29|2016-12-02|Saint-Gobain Glass France|SUBSTRATE WITH METALLIC TERMINAL LAYER AND OXIDED PRETERMAL LAYER THERMAL PROPERTIES|
    WO2016192569A2|2015-05-29|2016-12-08|Saint-Gobain Glass France|Low emissivity glass, method for manufacturing the same and vehicle window|WO2022013496A1|2020-07-16|2022-01-20|Saint-Gobain Glass France|Low-emissivity material comprising a coating having a titanium oxide based oxidation gradient|
    WO2022013495A1|2020-07-16|2022-01-20|Saint-Gobain Glass France|Low emissivity material comprising a thick titanium oxide based layer|
    FR3112545A1|2020-07-16|2022-01-21|Saint-Gobain Glass France|Low emissivity material comprising a thick titanium oxide based layer and a zinc tin oxide based layer|
    FR3112544A1|2020-07-16|2022-01-21|Saint-Gobain Glass France|Low-emissivity material comprising a coating comprising an oxidation gradient based on titanium oxide|
    FR3112543A1|2020-07-16|2022-01-21|Saint-Gobain Glass France|Low-emissivity material with thick titanium oxide layer|
    法律状态:
    2019-11-28| PLFP| Fee payment|Year of fee payment: 2 |
    2020-05-22| PLSC| Publication of the preliminary search report|Effective date: 20200522 |
    2020-11-30| PLFP| Fee payment|Year of fee payment: 3 |
    2021-11-30| PLFP| Fee payment|Year of fee payment: 4 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1860587A|FR3088633B1|2018-11-16|2018-11-16|THERMALLY TREATED MATERIAL WITH IMPROVED MECHANICAL PROPERTIES|FR1860587A| FR3088633B1|2018-11-16|2018-11-16|THERMALLY TREATED MATERIAL WITH IMPROVED MECHANICAL PROPERTIES|
    PCT/FR2019/052718| WO2020099801A1|2018-11-16|2019-11-15|Heat-treated material having improved mechanical properties|
    US17/291,912| US20220009826A1|2018-11-16|2019-11-15|Heat-treated material having improved mechanical properties|
    EP19835445.8A| EP3880623A1|2018-11-16|2019-11-15|Heat-treated material having improved mechanical properties|
    CONC2021/0006351A| CO2021006351A2|2018-11-16|2021-05-14|Heat treated material that has improved mechanical properties|
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